Annual Preventive Maintenance for ASML PAS 5500/275D Stepper

Notice ID:

AMD-SS22-02

Department/Ind. Agency:

COMMERCE, DEPARTMENT OF

Sub-tier:

COMMERCE, DEPARTMENT OF

Sub Command:

DEPT OF COMMERCE NIST

Office:

DEPT OF COMMERCE NIST

All Dates/Times are:

(UTC-04:00) EASTERN STANDARD TIME, NEW YORK, USA

Updated Published Date:

(UTC-04:00) EASTERN STANDARD TIME, NEW YORK, USA

Original Published Date:

2021-10-15 13:54:00

Original Response Date:

Oct 29, 2021 05:00 pm EDT

Inactive Policy:

15 days after response date

Original Inactive Date:

Nov 13, 2021

Initiative:

• None***--***

NAICS Code:

811219 - Other Electronic and Precision Equipment Repair and Maintenance

Original Set Aside:

The Center for Nanoscale Science and Technology (CNST) at the National Institute for Standards and Technology (NIST) seeks an annual maintenance service contract covering routine preventive maintenance (PM) as well as emergency services, repair, and calibration for one ASML PAS 5500/275D stepper lithography system. This system is located in the NIST CNST NanoFab in Gaithersburg, MD. NO SOLICITATION DOCUMENTS EXIST AT THIS TIME The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing a service agreement for preventive maintenance and emergency service for the ASML PAS 5500/275D stepper lithography system. After the results of the market research are obtained and analyzed, and specifications are developed for the preventative maintenance service contract for the ASML PAS 5500/275D stepper lithography system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. 1. GENERAL REQUIREMENTS The vendor shall provide factory trained personnel to maintain, calibrate, repair and replace parts as needed on an ASML PAS 5500/275D stepper lithography system. The vendor shall have at least two qualified engineers on staff at all times available for service response. Engineers shall be fully trained through ASML in areas which include maintenance, repair, and calibration operations. Engineers shall have at least three years of experience servicing ASML PAS 5500/275D stepper lithography systems. Engineers shall have access to any special tooling required when performing service and repair to system. 2. INSTRUMENT COVERAGE The instrument to be covered under this service agreement is an ASML PAS 5500/275D stepper lithography system, serial number 3740. The service contract shall cover all integrated system components of the instrument. The service contract shall cover the control and data preparation workstation. The service contract shall include all software updates and patches to maintain system using the latest and most recent software versions. Coverage shall include all parts and services listed below. 3. SCHEDULED SERVICE The vendor shall provide qualified service personnel to perform quarterly preventative maintenance (PM) visits to NIST to ensure the equipment is operating at peak performance. Preventative maintenance shall include at a minimum: Calibration of illumination subsystem Functional testing of the reticle and wafer handling subsystems Any parts found to be unsatisfactory shall be repaired or replaced 4. UNSCHEDULED SERVICE The vendor shall provide qualified service personnel onsite within one business day of an emergency service call during normal business hours at NIST. Business hours are defined as 8:00 am to 5:00 pm, Monday through Friday excluding federal holidays for the duration of this contract. Any parts found to be unsatisfactory shall be repaired or replaced. As part of any unscheduled service, the vendor may need to escalate the issue within the organization in order to resolve the problem. The vendor shall provide a detailed escalation plan which it will use in order to resolve stepper issues. 5. INSTRUMENT CONFIGURATION/ RE-CONFIGURATION SERVICE The vendor shall provide qualified service personnel onsite within one business day or less after receiving a request to reconfigure the wafer handling system in order to accommodate substrates which differ in size from the current configuration. Business hours are defined as 8:00 am to 5:00 pm, Monday through Friday excluding federal holidays for the duration of this contract. The system will require a reconfiguration back to the original wafer handling size once the lot of substrates have been exposed. The vendor shall be responsible for performing this task within one business day or less once the request has been made. 6. SERVICE PROCEDURE DOCUMENTATION The vendor shall provide information on what reference material is used, written or otherwise, as a diagnostic tool and guide to perform service functions, calibrations and repairs. Vendor shall explain how this information is made available to service engineers while performing maintenance and repair tasks in the field. 7. PARTS The vendor is responsible for supplying all parts necessary to maintain and/or repair the equipment and its associated subsystem components at the vendor’s expense. All parts used for maintenance and repair shall be OEM parts made for the instrument. Vendor must stock regular use and high failure rate parts for immediate availability. Vendor is responsible for all shipping of parts to NIST. Vendor is responsible for removal and disposal of all parts found to be defective. Vendor is responsible for any rigging required to install new parts. Vendor is responsible for the removal of any packaging or trash generated. 8. EXPERIENCE The vendor shall have at least five years of experience providing service and parts for ASML PAS 5500/275D stepper lithography systems using qualified personnel and OEM specified parts. 9. PAST PERFORMANCE The vendor shall provide a minimum of three references for similar service contracts issued to maintain an ASML PAS 5500 lithography system within the past three years. 10. PERIOD OF PERFORMANCE The base period of performance for this service contract will be one year from date of award with two additional option years which NIST may exercise following the initial one year period. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 811219, as those domestic sources with a size standard of $22M or less. Please include your company’s size classification and socio-economic status in any response to this notice. Companies that provide service contracts for ASML steppers are requested to email a detailed report describing their products to forest.crumpler@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities.

ACQUISITION MANAGEMENT DIVISION 100 BUREAU DR.

GAITHERSBURG , MD 20899

USA

Primary Point of Contacts:

Forest Crumpler